This book, the first dedicated to this exciting and rapidly growing field, enables readers to understand and prepare high-quality, high-performance TiNi shape memory alloys (SMAs). It covers the properties, preparation and characterization of TiNi SMAs, with particular focus on the latest technologies and applications in MEMS and biological devices. Basic techniques and theory are covered to introduce new-comers to the subject, whilst various sub-topics, such as film deposition, characterization, post treatment, and applying thin films to practical situations, appeal to more informed readers. Each chapter is written by expert authors, providing an overview of each topic and summarizing all the latest developments, making this an ideal reference for practitioners and researchers alike.
Author: American Society for Testing and Materials
Publisher: ASTM International
Category: Technology & Engineering
Recent advances in the mechanical properties of structural films are described in these papers from a November 2000 symposium held in Orlando, Florida. Papers are organized in sections on fracture and fatigue of structural films, elastic behavior and residual stress in thin films, tensile testing of
Authored by leading experts from around the world, the three-volume Handbook of Nanostructured Thin Films and Coatings gives scientific researchers and product engineers a resource as dynamic and flexible as the field itself. The first two volumes cover the latest research and application of the mechanical and functional properties of thin films and coatings, while the third volume explores the cutting-edge organic nanostructured devices used to produce clean energy. This second volume, Nanostructured Thin Films and Coatings: Functional Properties, focuses on functional properties (i.e., optical, electronic, and electrical) and related devices and applications. It also addresses topics such as: Large-scale fabrication of functional thin films using nanoarchitecture via chemical routes Fabrication and characterization of SiC nanostructured/nanocomposite films Low-dimensional nanocomposite fabrication and its applications Optical and optoelectronic properties of silicon nanocrystals embedded in SiO2 matrix Electrical properties of silicon nanocrystals embedded in amorphous SiO2 matrix Optical aspects of properties and applications of sol-gel-derived nanostructured thin films Controllably micro/nanostructured films and devices Thin-film shape memory alloy for microsystem applications A complete resource, this handbook provides the detailed explanations that newcomers need, as well as the latest cutting-edge research and data for experts. Covering a wide range of mechanical and functional technologies, including those used in clean energy, these books also feature figures, tables, and images that will aid research and help professionals acquire and maintain a solid grasp of this burgeoning field. The Handbook of Nanostructured Thin Films and Coatings is composed of this volume and two others: Nanostructured Thin Films and Coatings: Mechanical Properties Organic Nanostructured Thin Film Devices and Coatings for Clean Energy
The field of materials and process integration for MEMS research has an extensive past as well as a long and promising future. Researchers, academicians and engineers from around the world are increasingly devoting their efforts on the materials and process integration issues and opportunities in MEMS devices. These efforts are crucial to sustain the long-term growth of the MEMS field. The commercial MEMS community is heavily driven by the push for profitable and sustainable products. In the course of establishing high volume and low-cost production processes, the critical importance of materials properties, behaviors, reliability, reproducibility, and predictability, as well as process integration of compatible materials systems become apparent. Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures. One of the most common techniques is bulk micromachining, by which micromechanical structures are created by etching into the bulk of the substrates with either anisotropic etching with strong alk:ali solution or deep reactive-ion etching (DRIB). The second common technique is surface micromachining, by which planar microstructures are created by sequential deposition and etching of thin films on the surface of the substrate, followed by a fmal removal of sacrificial layers to release suspended structures. Other techniques include deep lithography and plating to create metal structures with high aspect ratios (LIGA), micro electrodischarge machining (J.